Aluminium implantation of p-SiC for ohmic contacts
Spieβ, L., Nennewitz, O., Weishart, H., Lindner, J., Skorupa, W., Romanus, H., Erler, F., Pezoldt, J.Volume:
6
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(97)00047-2
Date:
August, 1997
File:
PDF, 1.12 MB
english, 1997