Electrical properties of Ag/Ta and Ag/TaN thin-films

Microelectronic Engineering 2014 / 05 Vol. 120

Electrical properties of Ag/Ta and Ag/TaN thin-films

Mardani, Shabnam, Primetzhofer, Daniel, Liljeholm, Lina, Vallin, Örjan, Norström, Hans, Olsson, Jörgen
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Volume:
120
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2013.06.002
Date:
May, 2014
File:
PDF, 1.20 MB
english, 2014
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