Dependence of intrinsic stress and structure of ta-C film...

Diamond and Related Materials 2010 / 7 Vol. 19; Iss. 7-9

Dependence of intrinsic stress and structure of ta-C film on ion energy and substrate temperature in model of the non-local thermoelastic peak

Kalinichenko, A.I., Perepelkin, S.S., Strel'nitskij, V.E.
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Volume:
19
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2010.03.001
Date:
July, 2010
File:
PDF, 222 KB
english, 2010
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