Uniform diamond coatings on 4 in Si wafers
Mueller, C., Haenni, W., Binggeli, M., Hintermann, H.E.Volume:
2
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/0925-9635(93)90172-X
Date:
May, 1993
File:
PDF, 321 KB
english, 1993