Parylene-coated bioinspired artificial hair cell for liquid...

Microelectronic Engineering 2012 / 10 Vol. 98

Parylene-coated bioinspired artificial hair cell for liquid flow sensing

Qualtieri, Antonio, Rizzi, Francesco, Epifani, Gianmichele, Ernits, Andres, Kruusmaa, Maarja, De Vittorio, Massimo
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Volume:
98
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2012.07.072
Date:
October, 2012
File:
PDF, 563 KB
english, 2012
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