Direct fabrication of three-dimensional buried conductive...

Diamond and Related Materials 2009 / 5 Vol. 18; Iss. 5-8

Direct fabrication of three-dimensional buried conductive channels in single crystal diamond with ion microbeam induced graphitization

Olivero, P., Amato, G., Bellotti, F., Budnyk, O., Colombo, E., Jakšić, M., Manfredotti, C., Pastuović, Ž., Picollo, F., Skukan, N., Vannoni, M., Vittone, E.
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Volume:
18
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2008.10.068
Date:
May, 2009
File:
PDF, 655 KB
english, 2009
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