Very high frequency SAW devices based on nanocrystalline...

Diamond and Related Materials 2008 / 4 Vol. 17; Iss. 4-5

Very high frequency SAW devices based on nanocrystalline diamond and aluminum nitride layered structure achieved using e-beam lithography

Bénédic, F., Assouar, M.B., Kirsch, P., Monéger, D., Brinza, O., Elmazria, O., Alnot, P., Gicquel, A.
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Volume:
17
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2007.10.015
Date:
April, 2008
File:
PDF, 626 KB
english, 2008
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