Excimer laser ablation of silicon carbide ceramic targets

Diamond and Related Materials 2002 / 2 Vol. 11; Iss. 2

Excimer laser ablation of silicon carbide ceramic targets

Neri, Fortunato, Barreca, Francesco, Trusso, Sebastiano
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Volume:
11
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(01)00691-4
Date:
February, 2002
File:
PDF, 632 KB
english, 2002
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