Optimization of scandium oxide growth by high pressure sputtering on silicon
Feijoo, P.C., Pampillón, M.A., San Andrés, E., Lucía, M.L.Volume:
526
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2012.11.008
Date:
December, 2012
File:
PDF, 973 KB
english, 2012