A Cr-N thin film displacement sensor for precision positioning of a micro-stage
Peng, Yuxin, Ito, So, Shimizu, Yuki, Azuma, Toyohiro, Gao, Wei, Niwa, EijiVolume:
211
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2014.02.032
Date:
May, 2014
File:
PDF, 1.89 MB
english, 2014