Effects of acetylene/ammonia mixtures on the properties of carbon films prepared by thermal chemical vapor deposition
Lai, Liang-Hsun, Shiue, Sham-TsongVolume:
215
Language:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2012.10.068
Date:
January, 2013
File:
PDF, 1.19 MB
english, 2013