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Measurement of conductance of a sapphire sealed variable leak valve
Avdiaj, Sefer, Šetina, Janez, Erjavec, BojanVolume:
98
Language:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2012.09.018
Date:
December, 2013
File:
PDF, 761 KB
english, 2013