Dependence of electrical and mechanical durability on Zn...

Current Applied Physics 2012 / 12 Vol. 12

Dependence of electrical and mechanical durability on Zn content and heat treatment for co-sputtered ITZO films

Kwon, Sae hee, Jung, Jae heon, Cheong, Woo seok, Lee, Gun hwan, Song, Pung keun
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Volume:
12
Language:
english
Journal:
Current Applied Physics
DOI:
10.1016/j.cap.2012.05.024
Date:
December, 2012
File:
PDF, 834 KB
english, 2012
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