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Monolithic Integration of a Micromachined Flow Sensor based on Post-CMOS
Li, Dan, Yang, Fang, Zhao, Danqi, Li, Ting, Zhang, DachengVolume:
47
Year:
2012
Language:
english
Journal:
Procedia Engineering
DOI:
10.1016/j.proeng.2012.09.318
File:
PDF, 459 KB
english, 2012