Diamond-like carbon films as piezoresistors in highly sensitive force sensors
Petersen, M., Bandorf, R., Bräuer, G., Klages, C.-P.Volume:
26
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2012.04.004
Date:
June, 2012
File:
PDF, 602 KB
english, 2012