Kinetics of interlayer growth and changes in residual...

Nanostructured Materials 1993 / 1 Vol. 3; Iss. 1-6

Kinetics of interlayer growth and changes in residual elastic strain during annealing of Mo/Si multilayers

Rosen, R.S., Stearns, D.G., Kassner, M.E., Koike, J.-I., Cheng, Y., Vernon, S.P.
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Volume:
3
Language:
english
Journal:
Nanostructured Materials
DOI:
10.1016/0965-9773(93)90079-Q
Date:
January, 1993
File:
PDF, 470 KB
english, 1993
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