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Comparison of SiC sublimation epitaxial growth in graphite and TaC coated crucibles
Syväjärvi, M, Yakimova, R, Ciechonski, R.R, Janzén, EVolume:
12
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(03)00279-6
Date:
October, 2003
File:
PDF, 253 KB
english, 2003