Possible application of laser-induced backside dry etching...

Applied Surface Science 2013 / 8 Vol. 278

Possible application of laser-induced backside dry etching technique for fabrication of SERS substrate surfaces

Csizmadia, T., Hopp, B., Smausz, T., Kopniczky, J., Hanyecz, I., Sipos, Á., Csete, M., Szabó, G.
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Volume:
278
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2012.12.037
Date:
August, 2013
File:
PDF, 1.63 MB
english, 2013
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