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Surface roughness of AlN films deposited on negatively biased silicon and diamond substrates
Pigeat, P., Miska, P., Bougdira, J., Easwarakhanthan, T.Volume:
18
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2009.08.015
Date:
November, 2009
File:
PDF, 1.11 MB
english, 2009