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Axial uniformity of diamond-like carbon film deposited on metal rod by using microwave–sheath voltage combination plasma
Deng, Xingrui, Takaoka, Yasuyuki, Kousaka, Hiroyuki, Umehara, NoritsuguVolume:
238
Language:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2013.10.047
Date:
January, 2014
File:
PDF, 1.18 MB
english, 2014