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Phase noise analysis of micromechanical silicon resonant accelerometer
Shi, Ran, Jia, Fang-xiu, Qiu, An-ping, Su, YanVolume:
197
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2013.03.031
Date:
August, 2013
File:
PDF, 1.14 MB
english, 2013