Deposition of carbon nitride films using an electron...

Diamond and Related Materials 2000 / 4 Vol. 9; Iss. 3-6

Deposition of carbon nitride films using an electron cyclotron wave resonance plasma source

Rodil, S., Morrison, N.A., Milne, W.I., Robertson, J., Stolojan, V., Jayawardane, D.N.
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Volume:
9
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(99)00345-3
Date:
April, 2000
File:
PDF, 155 KB
english, 2000
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