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Deposition of carbon nitride films using an electron cyclotron wave resonance plasma source
Rodil, S., Morrison, N.A., Milne, W.I., Robertson, J., Stolojan, V., Jayawardane, D.N.Volume:
9
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(99)00345-3
Date:
April, 2000
File:
PDF, 155 KB
english, 2000