Effect of bias enhanced nucleation on the nucleation density of diamond in microwave plasma CVD
Ma, Yuefei, Tsurumi, Takaaki, Shinoda, Noriaki, Fukunaga, OsamuVolume:
4
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/0925-9635(95)00320-7
Date:
November, 1995
File:
PDF, 619 KB
english, 1995