Mode transition of power dissipation and plasma parameters...

Thin Solid Films 2013 / 11 Vol. 547

Mode transition of power dissipation and plasma parameters in an asymmetric capacitive discharge

Lee, Soo-Jin, Lee, Hyo-Chang, Bang, Jin-young, Oh, Seung-Ju, Chung, Chin-Wook
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Volume:
547
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2013.05.068
Date:
November, 2013
File:
PDF, 779 KB
english, 2013
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