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Atomistic simulation of energy and temperature effects in the deposition and implantation of amorphous carbon thin films
Marks, N.A, Bell, J.M, Pearce, G.K, McKenzie, D.R, Bilek, M.M.MVolume:
12
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(03)00215-2
Date:
October, 2003
File:
PDF, 428 KB
english, 2003