An indirectly clamped capacitive micromachined ultrasonic...

Sensors and Actuators A: Physical 2013 / 12 Vol. 203

An indirectly clamped capacitive micromachined ultrasonic transducer with a high electromechanical coupling factor

Kim, Dong Kyun, Chung, Seok-Whan, Jeong, Byung-Gil, Hong, Seog-Woo, Shin, Hyungjae
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Volume:
203
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2013.08.032
Date:
December, 2013
File:
PDF, 2.78 MB
english, 2013
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