Drilling of microholes down to 10μm in diameter using...

Precision Engineering 2014 / 07 Vol. 38; Iss. 3

Drilling of microholes down to 10μm in diameter using ultrasonic grinding

Egashira, Kai, Kumagai, Ryokei, Okina, Ryohei, Yamaguchi, Keishi, Ota, Minoru
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Volume:
38
Language:
english
Journal:
Precision Engineering
DOI:
10.1016/j.precisioneng.2014.02.010
Date:
July, 2014
File:
PDF, 1.73 MB
english, 2014
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