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An investigation of the hydrogenated Si-SiO2 interface by X-ray diffraction
Rzhanov, A.E., Filippov, V.I., Chaplanov, V.A., Yakimov, S.S.Volume:
6
Language:
english
Journal:
Materials Letters
DOI:
10.1016/0167-577X(88)90094-8
Date:
March, 1988
File:
PDF, 223 KB
english, 1988