Investigation of change of the composition and structure of...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2014 / 05 Vol. 326

Investigation of change of the composition and structure of the CaF2/Si films surface at the low-energy bombardment

Umirzakov, B.E., Tashmukhamedova, D.A., Ruzibaeva, M.K., Djurabekova, F.G., Danaev, S.B.
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Volume:
326
Language:
english
Journal:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
DOI:
10.1016/j.nimb.2013.10.094
Date:
May, 2014
File:
PDF, 767 KB
english, 2014
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