Investigation of Molecular Diffusivity of Photoresist...

Procedia Engineering 2012 Vol. 47

Investigation of Molecular Diffusivity of Photoresist Membrane using Coarse-Grained Molecular Dynamics Simulation

Yagyu, Hiromasa, Hirai, Yoshikazu, Makino, Yoshihide, Sugano, Koji, Toshiyuki, Tsuchiya, Tabata, Osamu
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Volume:
47
Year:
2012
Language:
english
Journal:
Procedia Engineering
DOI:
10.1016/j.proeng.2012.09.168
File:
PDF, 579 KB
english, 2012
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