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On the nature of the disordered layer produced by ion implantation
K. Zellama, P. Germain, S. Squelard, J.C. Bourgoin, J. Piaguet, J.Y. RobicVolume:
26
Year:
1978
Language:
english
Pages:
5
DOI:
10.1016/0038-1098(78)91248-6
File:
PDF, 345 KB
english, 1978