Application-relevant characterization of magnetron-sputtered carbon nitride films
Jelı́nek, M., Kulisch, W., Delplancke-Ogletree, M.P., Vorlı́ček, V., Studnička, V., Chvostová, D., Trchová, M., Sobota, J.Volume:
8
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(99)00145-4
Date:
October, 1999
File:
PDF, 219 KB
english, 1999