Dry etching properties of boron carbon nitride (BCN) films...

Diamond and Related Materials 2008 / 7 Vol. 17; Iss. 7-10

Dry etching properties of boron carbon nitride (BCN) films using carbon fluoride gas

Aoki, Hidemitsu, Tokuyama, Shinji, Sasada, Takashi, Watanabe, Daisuke, Mazumder, M.K., Kimura, Chiharu, Sugino, Takashi
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Volume:
17
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2008.01.062
Date:
July, 2008
File:
PDF, 804 KB
english, 2008
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