Novel method for intensity correction using a simple...

Sensors and Actuators A: Physical 2013 / 5 Vol. 194

Novel method for intensity correction using a simple maskless lithography device

Kattipparambil Rajan, Dhanesh, Raunio, Jukka-Pekka, Karjalainen, Markus Tapani, Ryynänen, Tomi, Lekkala, Jukka
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Volume:
194
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2013.01.024
Date:
May, 2013
File:
PDF, 1.44 MB
english, 2013
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