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Fabrication of Micro-Size Structures using Scanned Interference Pattern
Indrišiūnas, S., Voisiat, B., Račiukaitis, G.Volume:
41
Year:
2013
Language:
english
Journal:
Physics Procedia
DOI:
10.1016/j.phpro.2013.03.140
File:
PDF, 687 KB
english, 2013