Stress and interfacial defects induced by amorphous carbon...

Diamond and Related Materials 2005 / 3 Vol. 14; Iss. 3-7

Stress and interfacial defects induced by amorphous carbon film growth on silicon

Macchi, C., Mariazzi, S., Zecca, A., Karwasz, G.P., Brusa, R.S., Laidani, N., Bartali, R., Gottardi, G., Anderle, M.
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Volume:
14
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2004.10.010
Date:
March, 2005
File:
PDF, 317 KB
english, 2005
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