![](/img/cover-not-exists.png)
Structural and optical properties of magnetron-sputtered Er-doped AlN films grown under negative substrate bias
Legrand, Jérémy, Pigeat, Philippe, Easwarakhanthan, Thomas, Rinnert, HervéVolume:
307
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2014.04.013
Date:
July, 2014
File:
PDF, 1.46 MB
english, 2014