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Diamond nucleation enhancement by pretreating the silicon substrate with a fluorocarbon plasma
Schelz, S, Martinu, L, Moisan, MVolume:
7
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(98)00191-5
Date:
September, 1998
File:
PDF, 535 KB
english, 1998