Preparation of random stamps for thermal nanoimprint

Microelectronic Engineering 2012 / 10 Vol. 98

Preparation of random stamps for thermal nanoimprint

Wang, Si, Mayer, Andre, Dhima, Khalid, Möllenbeck, Saskia, Scheer, Hella-Christin
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Volume:
98
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2012.07.105
Date:
October, 2012
File:
PDF, 804 KB
english, 2012
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