The deposition of aluminum nitride on silicon by...

Diamond and Related Materials 1996 / 8 Vol. 5; Iss. 10

The deposition of aluminum nitride on silicon by plasma-enhanced metal-organic chemical vapour deposition

Stauden, Th., Eichhorn, G., Cimalla, V., Pezoldt, J., Ecke, G.
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Volume:
5
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/0925-9635(96)00512-2
Date:
August, 1996
File:
PDF, 305 KB
english, 1996
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