Ultrananocrystalline diamond thin films for MEMS and moving mechanical assembly devices
Krauss, A.R., Auciello, O., Gruen, D.M., Jayatissa, A., Sumant, A., Tucek, J., Mancini, D.C., Moldovan, N., Erdemir, A., Ersoy, D., Gardos, M.N., Busmann, H.G., Meyer, E.M., Ding, M.Q.Volume:
10
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(01)00385-5
Date:
November, 2001
File:
PDF, 1.69 MB
english, 2001