Nitrogen doping in atomic layer deposition grown titanium...

Thin Solid Films 2012 / 12 Vol. 526

Nitrogen doping in atomic layer deposition grown titanium dioxide films by using ammonium hydroxide

Kääriäinen, M.-L., Cameron, D.C.
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Volume:
526
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2012.11.005
Date:
December, 2012
File:
PDF, 857 KB
english, 2012
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