Laser-induced front side etching of fused silica with...

Applied Surface Science 2013 / 8 Vol. 278

Laser-induced front side etching of fused silica with femtosecond laser radiation using thin metal layers

Lorenz, Pierre, Ehrhardt, Martin, Zimmer, Klaus
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Volume:
278
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2012.11.047
Date:
August, 2013
File:
PDF, 340 KB
english, 2013
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