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Process for lift-off transfer of pyrolyzed polymer onto low thermal tolerance substrate
Kobayashi, Taizo, Akazawa, Akira, Mori, Yuki, Furuno, Yutaro, Konishi, SatoshiVolume:
180
Language:
english
Journal:
Sensors and Actuators B: Chemical
DOI:
10.1016/j.snb.2011.10.080
Date:
April, 2013
File:
PDF, 1.27 MB
english, 2013