Surface nanostructures on low energy Zn ion implanted...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2014 / 05 Vol. 326

Surface nanostructures on low energy Zn ion implanted crystalline Si and their thermal evolution at different atmospheres

Liu, Changlong, Zhao, Hang, Shen, Yanyan, Jia, Guangyi, Wang, Jun, Mu, Xiaoyu
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Volume:
326
Language:
english
Journal:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
DOI:
10.1016/j.nimb.2013.10.056
Date:
May, 2014
File:
PDF, 1.44 MB
english, 2014
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