Formation of silicon carbide and silicon carbonitride by...

Diamond and Related Materials 2001 / 3 Vol. 10; Iss. 3-7

Formation of silicon carbide and silicon carbonitride by RF-plasma CVD

Sachdev, H, Scheid, P
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Volume:
10
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(00)00575-6
Date:
March, 2001
File:
PDF, 1.29 MB
english, 2001
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