Hydrogen exodiffusion experiments in phosphorus doped...

Hydrogen exodiffusion experiments in phosphorus doped aSi:H

K. Zellama, P. Germain, S. Squelard, J. Magariño, B. Bourdon
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Volume:
47
Year:
1983
Language:
english
Pages:
4
DOI:
10.1016/0038-1098(83)90923-7
File:
PDF, 270 KB
english, 1983
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