Effect of magnetron sputtered silicon nitride on the...

Surface and Coatings Technology 2013 / 9 Vol. 231

Effect of magnetron sputtered silicon nitride on the water-vapor-permeation-rate of polyimide thin film

Tseng, I-Hsiang, Chang, Chi-Jung, Chang, Chin-Wen, Lu, Horng-Hwa, Tsai, Mei-Hui
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Volume:
231
Language:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2012.07.038
Date:
September, 2013
File:
PDF, 1.09 MB
english, 2013
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