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Growth of cBN films by d.c.-bias assisted inductively-coupled r.f. plasma chemical vapor deposition
Yu, J, Matsumoto, SVolume:
12
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2003.08.006
Date:
October, 2003
File:
PDF, 499 KB
english, 2003