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Tetrahedral carbon film by hydrogen gas reactive rf-sputtering of graphite onto low temperature substrate
Akio Hiraki, Toshifumi Kawano, Youichi Kawakami, Masao Hayashi, Tatsuro MiyasatoVolume:
50
Year:
1984
Language:
english
Pages:
4
DOI:
10.1016/0038-1098(84)90970-0
File:
PDF, 213 KB
english, 1984